| |
| Core-less type/ S type, A type,
B type |
|
The light coil unit achieves high response, smooth movement and reduces
guide load due to no magnetic pulling force.
|
| Thrust
7N～300N 11 kinds |
Specification, Characteristic figure,
and outline drawing of individual type can bee seen.
It takes a little bit time to execute it. Please wait.
 |
S type, |
|
A type, |
|
B type |
|
|
| |
| ■Core-type/ M type,
N type |
|
Since thrust density is large, big thrust can be gained and minimize
installation space.
|
| Thrust
250N～1500N 6 kinds |
Specification, Characteristic figure,
and outline drawing of individual type can bee seen.
It takes a little bit time to execute it. Please wait.
|
M type, |
|
N type, |
|
|
| |
| ■Common
performance/ Features |
| ◆A magnet assembled in a module
enables free stroke movement |
| ◆Max. allowable acceleration
20G |
| ◆Positioning stability 10ms or
less |
| ◆Highly accurate Positioning
down to sub-micron 0.1m |
| ◆Wide speed range ultra low speed
10m/s~ ultra high speed 3m/s |
| ◆Sensor types and sample assemblies |
|
|
Sensor type and sample assembly can be seen.
It takes a little bit time to execute it. Please wait. |
|
| |
| ■Application |
| ●Semi-conductor production machine |
| Mass production handler, Diffusion
furnace, Electronic drawing machine, Wafer transport machine, XY stage |
| ●Transportation machine |
| Pick up and place of quite frequent
transportation, Cloud table, High speed feed press |
| ●Inspection/ Measurement |
| |
